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Mar 28, 2024
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2018-19 University Catalog [ARCHIVED CATALOG]
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MET 462 - Vacuum Technology Lecture Hours: 2 Lab Hours: 3 Credit Hours: 3
An introductory course defining the role of high and ultra-high vacuum in the process of high vacuum technology. Material will include such topics as vacuum pumping, vacuum gauging, processing of materials in a vacuum, evaporative deposition, sputtering, thin films, mass spectrometry, and leak detection.
Prerequisite: MET 417
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