2017-18 University Catalog 
    
    Jun 14, 2024  
2017-18 University Catalog [ARCHIVED CATALOG]

REE 565 - Semiconductor Process Engineering


Lecture Hours: 3
Lab Hours: 0
Credit Hours: 3

Semiconductor process technology: crystal growth, silicon oxidation, photolithography, etching, diffusion, ion implantation, film deposition. Process integration, manufacturing, and metrology. Future trends and challenges.